mag7 armset_lam 200/300應用機型：
lam_200mm
lam_300mm
mag7 armset_nvls 200/300應用機型：
novellus_cvd _200mm
novellus_cvd _300mm
| 型式 | repair | overhaul | exchange |
| brooks mag7 armset_nvls 200 |  | | |
| brooks mag7 armset_nvls 300 | | | |
| brooks mag7 armset_lam 200 | | | |
| brooks mag7 armset_lam 300 | | |